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, Influence of seed layer systems and their premagnetization by low temperature annealing on electrodeposited Ni-Fe fluxgate cores, IEEE Transactions on Magnetics, Bd. 47, S. 161–169, 2011.
, A novel monolithically fabricated lorentz force actuator using polymer magnets, INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference, 2005.
, Softlithographic, partial integration of surface-active nanoparticles in a PDMS matrix for microfluidic biodevices, Physica Status Solidi (A) Applications and Materials Science, Bd. 207, S. 898–903, 2010.
, Fabrication of an optimized microliter culture device with integrated optical pH monitoring, 15th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2011, MicroTAS 2011, Bd. 2, 2011.
, Tolerance analysis and synthesis in micro systems, Proceedings of SPIE - The International Society for Optical Engineering, Bd. 4755, 2002.
, Development and integration of xerogel polymeric absorbance micro-filters into lab-on-chip systems, Optics Express, Bd. 20, S. 23700–23719, 2012.
, Fabrication of differential SMA driven micro grippers in batch-technology, EUSPEN 2005 - Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology, 2005.
, IDeFi x - Interactive tool in the definition of multi dimensional operating structures [IDeFi x - Interaktives Werkzeug zur Definition mehrdimensionaler Funktionsstrukturen], Konstruktion, S. 73–74, 2010.
, Rapid prototyping of micromechanical devices using a Q-switched Nd:YAG laser with optional frequency doubling, Sensors and Actuators, A: Physical, Bd. 76, S. 381–385, 1999.
, Development of a 3D-CAD add-in for tolerance analysis and synthesis in micro systems (\textgreek{m}-ToAST), DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003, 2003.
, In situ monitoring of single-wall carbon nanotube laser assisted growth, Nanotechnology, Bd. 21, 2010.
, Silicon microgripper for microassembly realized by photolithography and fast anisotropic silicon etching, Proceedings of SPIE - The International Society for Optical Engineering, Bd. 3519, 1998.
, A reconfigurable superparamagnetic bead filter for microfluidic detection of bio-material, Microelectronic Engineering, Bd. 87, S. 742–746, 2010.
, Optimization of lithographic masks using genetic algorithms, Analog Integrated Circuits and Signal Processing, Bd. 48, S. 49–56, 2006.
, Broadband transitions for membrane-based coplanar waveguides on highly-conductive silicon substrates, Advances in Radio Science, Bd. 10, S. 13–18, 2012.
, A novel electrically controlled flexible liquid micro lens, DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003, 2003.
, Innovative High-Precision Position Sensor Systems for Robotic and Automotive Applications, Procedia Chemistry, Bd. 1, 2009.
, Microoptical distance sensor with integrated microoptics applied to an optical microphone, Proceedings of IEEE Sensors, Bd. 2005, 2005.
, A novel three-axis silicon probe with integrated circuit on chip for microsystem components, Proceedings of SPIE - The International Society for Optical Engineering, Bd. 5116 II, 2003.
, MEMS fluxgate magnetometer for parallel robot application, Microsystem Technologies, Bd. 16, S. 787–790, 2010.
, Disposable multiple internal reflection systems for photonic cell screening, 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010, Bd. 2, 2010.
, Recent developments in dimensional metrology for microsystem components, Microsystem Technologies, Bd. 8, S. 3–6, 2002.
, Closely coupled micro coils with integrated flux guidance: Fabrication technology and application to proximity and magnetoelastic force sensors, IEEE Sensors Journal, Bd. 3, S. 615–621, 2003.
, CAD environment for micro components [CAD-entwurfsumgebung für mikrokomponenten], Technisches Messen, Bd. 70, S. 244–250, 2003.
, Closed-loop control of laser assisted chemical vapor deposition growth of carbon nanotubes, Journal of Applied Physics, Bd. 112, 2012.

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