Export 1175 results:
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, Shape memory microactuators, Microsystem Technologies, Bd. 7, S. 165–170, 2001.
, A micro linear motor with integrated passive magnetic guidance, IECON Proceedings (Industrial Electronics Conference), 2006.
, Simulation of anisotropic chemical etching of crystalline silicon using a cellular automata model, Sensors and Actuators: A. Physical, Bd. 45, S. 85–89, 1994.
, Ion projection printing for patterning of magnetic media, Digests of the Intermag Conference, 2002.
, Shear stress analysis in a ferrofluidic magnetic micropump, Nanoscale and Microscale Thermophysical Engineering, Bd. 15, S. 1–15, 2011.
, Rapid prototyping of micromechanical devices using a Q-switched Nd:YAG laser with optional frequency doubling, Sensors and Actuators, A: Physical, Bd. 76, S. 381–385, 1999.
, A long stroke electromagnetic XY positioning stage for micro applications, IEEE/ASME Transactions on Mechatronics, Bd. 17, S. 866–875, 2012.
, PTB-Bericht E-54 {\dq}Moderne Werkstoffe - Sensoren{\dq}. {Physikalisch-Technische Bundesanstalt}, Braunschweig, 1997.
, Centering electrostatic microgripper and magazines for microassembly tasks, Proceedings of SPIE - The International Society for Optical Engineering, Bd. 4568, 2001.
, High aspect ratio spiral and vertical meander micro coils for actuator applications, Microsystem Technologies, Bd. 10, S. 564–570, 2004.
, Quad beam polymeric optomechanical systems, Proceedings of SPIE - The International Society for Optical Engineering, Bd. 7266, 2008.
, Microfluidic reactor for continuous cultivation of Saccharomyces cerevisiae, Biotechnology Progress, Bd. 26, S. 1259–1270, 2010.
, Mixed system and component level T-CAD for micro fabrication, DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003, 2003.
, PDMS-based, magnetically actuated variable optical attenuators obtained by soft lithography and inkjet printing technologies, Sensors and Actuators, A: Physical, Bd. 215, S. 30–35, 2014.
, Ion projection surface structuring with noble gas ions at 75 keV, Surface and Coatings Technology, Bd. 201, S. 8437–8441, 2007.
, Innovative High-Precision Position Sensor Systems for Robotic and Automotive Applications, Procedia Chemistry, Bd. 1, 2009.
, Photonic lab on a chip on polydimethylsiloxane segmented waveguides for local measurement of optical density, 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010, Bd. 1, 2010.
, ISMTII 2011 - The 10th International Symposium of Measurement Technology and Intelligent Instruments 2011. 2011.
, Bistable curved-beam actuated by optically controlled Shape Memory Alloy, IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM, 2010.
, Novel microrobots and micromotors using lorentz force driven linear microactuators based on polymer magnets, IEEE Transactions on Magnetics, Bd. 43, S. 3891–3895, 2007.
, A three dimensional measurement system with micro tactile sensor, Proceedings of SPIE - The International Society for Optical Engineering, Bd. 4902, 2002.
, Nanopatterning of magnetic disks by single-step Ar+ ion projection, Advanced Materials, Bd. 15, S. 1152–1155, 2003.
, Transient behaviour of magnetic micro-bead chains rotating in a fluid by external fields, Lab on a Chip - Miniaturisation for Chemistry and Biology, Bd. 7, S. 1746–1751, 2007.
, Closely coupled micro coils with integrated flux guidance: Fabrication technology and application to proximity and magnetoelastic force sensors, IEEE Sensors Journal, Bd. 3, S. 615–621, 2003.
, Taktile Sensoren für die Mikromesstechnik, VDI Berichte, S. 109–118, 2006.

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