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, Development of a 3D-CAD add-in for tolerance analysis and synthesis in micro systems (\textgreek{m}-ToAST), DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003, 2003.
, In situ monitoring of single-wall carbon nanotube laser assisted growth, Nanotechnology, Bd. 21, 2010.
, Silicon microgripper for microassembly realized by photolithography and fast anisotropic silicon etching, Proceedings of SPIE - The International Society for Optical Engineering, Bd. 3519, 1998.
, A reconfigurable superparamagnetic bead filter for microfluidic detection of bio-material, Microelectronic Engineering, Bd. 87, S. 742–746, 2010.
, Optimization of lithographic masks using genetic algorithms, Analog Integrated Circuits and Signal Processing, Bd. 48, S. 49–56, 2006.
, Broadband transitions for membrane-based coplanar waveguides on highly-conductive silicon substrates, Advances in Radio Science, Bd. 10, S. 13–18, 2012.
, A novel electrically controlled flexible liquid micro lens, DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003, 2003.
, Microoptical distance sensor with integrated microoptics applied to an optical microphone, Proceedings of IEEE Sensors, Bd. 2005, 2005.
, A novel three-axis silicon probe with integrated circuit on chip for microsystem components, Proceedings of SPIE - The International Society for Optical Engineering, Bd. 5116 II, 2003.
, MEMS fluxgate magnetometer for parallel robot application, Microsystem Technologies, Bd. 16, S. 787–790, 2010.
, Recent developments in dimensional metrology for microsystem components, Microsystem Technologies, Bd. 8, S. 3–6, 2002.
, Disposable multiple internal reflection systems for photonic cell screening, 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010, Bd. 2, 2010.
, CAD environment for micro components [CAD-entwurfsumgebung für mikrokomponenten], Technisches Messen, Bd. 70, S. 244–250, 2003.
, Biophotonic lab on a chip with integrated size-exclusion microfilters for cell proliferation monitoring, Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012, 2012.
, A novel fabrication process for 3D meander shaped micro coils in SU8 dielectric and their application to linear micro motors, Proceedings of SPIE - The International Society for Optical Engineering, Bd. 4407, 2001.
, Benefits of on-wafer calibration standards fabricated in membrane technology, Advances in Radio Science, Bd. 9, S. 19–26, 2011.
, Photonic biosensor for lab-on-a-chip applications, 10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010, 2010.
, Ion projection direct structuring for patterning of magnetic media, IEEE Transactions on Magnetics, Bd. 38, S. 1952–1954, 2002.
, Time dependent growth of vertically aligned carbon nanotube forest using a laser activated catalytical CVD method, Physica Status Solidi (B) Basic Research, Bd. 245, S. 1927–1930, 2008.
, Microplasma stamps for area-selective modification of polymer surfaces, Plasma Processes and Polymers, Bd. 6, S. S370-S374, 2009.
, RMS voltage sensor based on a variable parallel-plate capacitor made of electroplated copper, Microsystem Technologies, Bd. 16, S. 1665–1671, 2010.
, Effect of physical vapor deposition metallic thin films on micro injection molded weld line mechanical properties, Microsystem Technologies, Bd. 16, S. 1009–1013, 2010.
, , , , , und /VDE-IT, V. D. I. , MikroSystemTechnik: Kongress 2013 Proceedings. VDE-Verlag, 2013.
, The effect of different monolithically integrated check valve designs on the efficiency of disposable PZT-PDMS-micropumps, ASME 2010 8th International Conference on Nanochannels, Microchannels, and Minichannels Collocated with 3rd Joint US-European Fluids Engineering Summer Meeting, ICNMM2010, 2010.
, Passive joint-sensor applications for parallel robots, 2004 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS), Bd. 4, 2004.

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